Measurement of surface roughness in buried channel waveguides
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Ladouceur, F.
Love, J. D.
Senden, T. J.
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Abstract
An atomic force microscope is employed in a novel method for measuring the edge roughness of masks used in the fabrication of rectangular-core buried channel waveguides. Light attenuation due to scattering loss from the sides of the core can then be estimated using a simple statistical model of the data.
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Electronics Letters
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