Effects of Au catalyst on GaAs (111)<sub>B</sub> surface during annealing

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Liao, Z. M.
Xu, H. Y.
Sun, W.
Guo, Y. N.
Yang, L.
Chen, Z. G.
Zou, J.
Lu, Z. Y.
Chen, P. P.
Lu, W.

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IEEE

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To understand the growth mechanism and the effect of catalysts in growing III-V epitaxial nanowires, GaAs (111)B substrates with Au thin films were annealed in a molecular beam epitaxy (MBE) system. Scanning/transmission electron microscopy (SEM/TEM) investigations indicate that, during annealing, the Au catalysts were formed and affect significantly the surface morphology of the GaAs substrates.

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2012 Conference on Optoelectronic and Microelectronic Materials and Devices, COMMAD 2012 - Proceedings

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