Analysis of Optical Properties of Thin Passivation Layers Using Ultra-High-Q Mid-IR Microresonators
Date
Authors
Suk, Daewon
Ko, Kiyoung
Kim, Jingyu
Park, Sang Hee Ko
Wang, Rongping
Choi, Duk Yong
Lee, Hansuek
Journal Title
Journal ISSN
Volume Title
Publisher
Access Statement
Abstract
We report optical property changes in mid-infrared ultra-high-Q on-chip resonators due to nanometer-thick Al2O3 and TiO2 passivation films. Despite resistance to degradation, absorption losses were observed because of internal impurities and altered surface chemistry.
Description
Keywords
Citation
Collections
Source
Type
Book Title
Entity type
Publication