Prevention of oxide formation during liquid phase epitaxy of silicon

Abstract

Successful growth of silicon in a liquid phase epitaxial (LPE) system requires preventing the formation of a native oxide more than a few monolayers thick. It has been found that the desorption of oxygen and water vapor from the ends of the furnace tube can lead to oxidation of silicon wafers located in the tube center, thus inhibiting epitaxy. A simple method to avoid this problem and eliminate the need for long flush times is described. Evidence is presented that indium, a common solvent in LPE of silicon, plays a catalytic role in the oxidation of silicon. Show more