Skip navigation
Skip navigation
A change is coming. Click to see a sneak peek of the new Open Research Repository.

Browsing by Author van der Heijden, R. W.

0-9 A B C D E F G H I J K L M N O P Q R S T U V W X Y Z
Or enter first few letters:  
Showing results 1 to 1 of 1
01_Carlström_Comparative_study_of_Cl₂,_2008.pdf.jpg

Comparative study of Cl₂, Cl₂/O₂, and Cl₂/N₂ inductively coupled plasma processes for etching of high-aspect-ratio photonic-crystal holes in InP

Author(s)Carlström, C. F; van der Heijden, Rob W.; Andriesse, M. S. P., et al
TypeJournal article
Date Published5-Sep-2008
Date Created-
  • previous
  • 1
  • next

Updated:  12 April 2016/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator