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Browsing by Author Zellweger, Hans

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01_Jin_Comparison_of_the_thermal_2006.pdf.jpg

Comparison of the thermal stabilityof thermally grown silicon dioxide on silicon before and after LPCVD deposition

Author(s)Jin, Hao; Zellweger, Hans; Weber, Klaus, et al
TypeConference paper
Date Published2006
Date CreatedSeptember 13-15 2006
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