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Browsing by Author Nielsen, H. Kortegaard

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01_Lévêque_Vacancy_and_interstitial_depth_2003.pdf.jpg

Vacancy and interstitial depth profiles in ion-implanted silicon

Author(s)Lévêque, P.; Nielsen, H. Kortegaard; Pellegrino, P., et al
TypeJournal article
Date Published15-Jan-2003
Date Created-
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