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01_Zhao_Nanopatterning_of_epitaxial_2004.pdf.jpg

Nanopatterning of epitaxial CoSi₂ using oxidation in a local stress field and fabrication of nanometer metal-oxide-semiconductor field-effect transistors

Author(s)Zhao, Q. T.; Kluth, P.; Bay, H. L., et al
TypeJournal article
Date Published15-Nov-2004
Date Created-
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