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Browsing by Author Hierlemann, A

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Micropatterning Layers by Flame Aerosol Deposition-Annealing

Author(s)Tricoli, Antonio; Graf, M; Mayer, F, et al
TypeJournal article
Date Published2008
Date Created-

Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors

Author(s)Kuhne, S; Graf, M; Tricoli, Antonio, et al
TypeJournal article
Date Published2008
Date Created-
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