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Browsing by Author Gatzert, C.

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01_Gatzert_Investigation_of_reactive_ion_2006.pdf.jpg

Investigation of reactive ion etching of dielectrics and Si in CHF₃/O₂ or CHF₃/Ar for photovoltaic applications

Author(s)Gatzert, C.; Deenapanray, Prakash N. K.; Macdonald, D., et al
TypeJournal article
Date Published-
Date Created7/08/2006
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