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Browsing by Author Corr, Cormac S.

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01_Booth_Fluorine_negative_ion_density_2006.pdf.jpg

Fluorine negative ion density measurement in a dual frequency capacitive plasma etch reactor by cavity ring-down spectroscopy

Author(s)Booth, Jean-Paul; Corr, Cormac S.; Curley, Garrett A., et al
TypeJournal article
Date Published12-Apr-2006
Date Created-
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