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Browsing by Author Chabert, Pascal

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Showing results 1 to 8 of 8

Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Author(s)Corr, Cormac; Despiau-Pujo, E; Chabert, Pascal, et al
TypeJournal article
Date Published2008
Date Created-

High rate etching of 4H-SiC using a SF6/O2 helicon plasma

Author(s)Chabert, Pascal; Proust, N; Perrin, J, et al
TypeJournal article
Date Published2000
Date Created-

Kinetic model for a low-pressure discharge with negative ions

Author(s)Chabert, Pascal; Sheridan, T
TypeJournal article
Date Published2000
Date Created-

Negative Ion Distribution in an SF6 Helicon Discharge Measured Using Electrostatic Probes

Author(s)Chabert, Pascal; Sheridan, T; Boswell, Roderick, et al
TypeJournal article
Date Published1999
Date Created-

Negative ions in single and dual frequency capacitively coupled fluorocarbon plasmas Yes

Author(s)Curley, Garret A; Maric, Dragana; Booth, Jean-Paul, et al
TypeJournal article
Date Published2007
Date Created-

Propagating double layers in electronegative plasmas

Author(s)Meige, Albert; Plihon, N.; Hagelaar, Gerjan, et al
TypeJournal article
Date Published2007
Date Created-

Spatially limited ion acoustic wave activity in low-pressure helicon discharges

Author(s)Corr, C S; Plihon, N; Chabert, Pascal, et al
TypeJournal article
Date Published2004
Date Created-

Spatially limited ion acoustic wave activity in low-pressure helicon discharges

Author(s)Corr, Cormac; Plihon, N.; Chabert, Pascal, et al
TypeJournal article
Date Published2004
Date Created-
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