Browsing by Author Yin, Yongbai
Showing results 1 to 3 of 3
Micro-arcing instability in radio frequency plasmas
Author(s) | Yin, Yongbai; Bilek, Marcela; McKenzie, David R., et al |
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Type | Journal article |
Date Published | 2004 |
Date Created | - |
Micro-arcing instability in RF PECVD plasma system
Author(s) | Yin, Yongbai; Bilek, Marcela; McKenzie, David R., et al |
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Type | Journal article |
Date Published | 2005 |
Date Created | - |
The effect of phase difference between powered electrodes on RF plasmas
Author(s) | Proschek, M; Yin, Yongbai; Charles, Christine, et al |
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Type | Journal article |
Date Published | 2005 |
Date Created | - |
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