Browsing by Author Virwani, Kumar
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Surface Modification of Silicon Nano Mechanical Structures by Carbon Ion Implantation for Post-fabrication Transformation to Silicon Carbide
Author(s) | Virwani, Kumar; Sood, Dinesh Kumar; Elliman, Robert, et al |
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Type | Conference paper |
Date Published | 2006 |
Date Created | November 28-December 2 2005 |
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