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Browsing by Author Virwani, Kumar

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Surface Modification of Silicon Nano Mechanical Structures by Carbon Ion Implantation for Post-fabrication Transformation to Silicon Carbide

Author(s)Virwani, Kumar; Sood, Dinesh Kumar; Elliman, Robert, et al
TypeConference paper
Date Published2006
Date CreatedNovember 28-December 2 2005

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