Browsing by Author Pellegrino, P.
Showing results 1 to 2 of 2
Separation of vacancy and interstitial depth profiles in ion-implanted silicon: Experimental observation
Author(s) | Pellegrino, P.; Lévêque, P.; Wong-Leung, Jennifer, et al |
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Type | Journal article |
Date Published | 28-May-2001 |
Date Created | - |
Vacancy and interstitial depth profiles in ion-implanted silicon
Author(s) | Lévêque, P.; Nielsen, H. Kortegaard; Pellegrino, P., et al |
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Type | Journal article |
Date Published | 15-Jan-2003 |
Date Created | - |
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