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Browsing by Author Malshe, Ajay P

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Modification of Mechanical Properties of Silicon Nanocantilevers by Self-ion Implantation

Author(s)Virwani, Kumar; Malshe, Ajay P; Sood, Dinesh Kumar, et al
TypeJournal article
Date Published2004
Date Created-

Surface Modification of Silicon Nano Mechanical Structures by Carbon Ion Implantation for Post-fabrication Transformation to Silicon Carbide

Author(s)Virwani, Kumar; Sood, Dinesh Kumar; Elliman, Robert, et al
TypeConference paper
Date Published2006
Date CreatedNovember 28-December 2 2005
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