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Browsing by Author Jarnyk, Mark

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01_Meige_Particle-in-cell_simulation_of_2005.pdf.jpg

Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process

Author(s)Meige, Albert; Jarnyk, Mark; Kwok, Dixon T. K., et al
TypeJournal article
Date Published25-Mar-2005
Date Created-

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