Browsing by Author Chua, Sheon (SSSY)
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Picometer level displacement metrology with digitally enhanced heterodyne interferometry
Author(s) | De Vine, Glenn; Rabeling, D; Slagmolen, Bram Johannes Jozef, et al |
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Type | Journal article |
Date Published | 9-Jan-2009 |
Date Created | - |
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