Browsing by Author Boswell, Rod W.
Showing results 8 to 8 of 8
Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process
Author(s) | Meige, Albert; Jarnyk, Mark; Kwok, Dixon T. K., et al |
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Type | Journal article |
Date Published | 25-Mar-2005 |
Date Created | - |
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