Browsing by Author Allen, Thomas G.
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Plasma enhanced atomic layer deposition of gallium oxide on crystalline silicon: demonstration of surface passivation and negative interfacial charge
Author(s) | Allen, Thomas G.; Cuevas, Andres |
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Type | Journal article |
Date Published | Apr-2015 |
Date Created | - |
Silicon Surface Passivation by Gallium Oxide Capped With Silicon Nitride
Author(s) | Allen, Thomas G.; Wan, Yimao Y.; Cuevas, Andres |
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Type | Journal article |
Date Published | 2016 |
Date Created | - |
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