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Suppression of ion-implantation induced porosity in germanium by a silicon dioxide capping layer
Author(s) | Tran, T; Alkhaldi, Huda; Gandhi, Hemi, et al |
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Type | Journal article |
Date Published | 2016 |
Date Created | - |
The influence of capping layers on pore formation in Ge during ion implantation
Author(s) | Alkhaldi, Huda; Tran, Tuan; Kremer, Felipe, et al |
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Type | Journal article |
Date Published | 2016 |
Date Created | - |
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